Inventor
DRUZHININA TAMARA
NL11 patents
Patents
11 patentsUS11092902B2Aug 17, 2021
Method and apparatus for detecting substrate surface variations
ASML NETHERLANDS BV2 citations70
US10712656B2Jul 14, 2020
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV4 citations70
US12500063B2Dec 16, 2025
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
US11875966B2Jan 16, 2024
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
US11094502B2Aug 17, 2021
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
US10551736B2Feb 4, 2020
Methods for providing lithography features on a substrate by self-assembly of block copolymers
ASML NETHERLANDS BV1 citations60
US10240250B2Mar 26, 2019
Method to provide a patterned orientation template for a self-assemblable polymer
ASML NETHERLANDS BV1 citations58
US12399428B2Aug 26, 2025
Method and apparatus for forming a patterned layer of material
ASML NETHERLANDS BV0 citations57
US12325911B2Jun 10, 2025
Method and apparatus for forming a patterned layer of material
ASML NETHERLANDS BV0 citations54
US9368366B2Jun 14, 2016
Methods for providing spaced lithography features on a substrate by self-assembly of block copolymers
ASML NETHERLANDS BV1 citations51
US10127336B2Nov 13, 2018
Method of simulating formation of lithography features by self-assembly of block copolymers
ASML NETHERLANDS BV0 citations30