Inventor
CHEN PING-YUAN
TW4 patents
Patents
4 patentsUS11268186B2Mar 8, 2022
Target structure of physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US10718048B2Jul 21, 2020
Target structure of physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations66
US11649543B2May 16, 2023
Target structure of physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9287151B2Mar 15, 2016
Systems and method for transferring a semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations47