Inventor
CHEN LONG-YI
TW4 patents
Patents
4 patentsUS10461037B2Oct 29, 2019
Method for forming semiconductor device structure with overlay grating
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US10867933B2Dec 15, 2020
Method for forming semiconductor device structure with overlay grating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10734325B2Aug 4, 2020
Method for forming semiconductor device structure with overlay grating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10204867B1Feb 12, 2019
Semiconductor metrology target and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46