Inventor
WU LI-JEN
TW15 patents
⚠️ This page may combine multiple inventors who share the name “WU LI-JEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
14 patentsUS11029603B2Jun 8, 2021
Chemical replacement system
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US10857676B2Dec 8, 2020
Photoresist bottle replacement system
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US12025533B2Jul 2, 2024
System and method for liquid leak detection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11899368B2Feb 13, 2024
Manufacturing method of semiconductor device and semiconductor processing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11454891B2Sep 27, 2022
Manufacturing method of semiconductor device and semiconductor processing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11199466B2Dec 14, 2021
System and method for liquid leak detection
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11061333B2Jul 13, 2021
Manufacturing method of semiconductor device and semiconductor processing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11004709B2May 11, 2021
Method for monitoring gas in wafer processing system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12576538B2Mar 17, 2026
Photoresist bottle replacement system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11679510B2Jun 20, 2023
Photoresist bottle replacement system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10943802B2Mar 9, 2021
Photoresist bottle container
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11969677B2Apr 30, 2024
Method of using liquid supply system with improved bubble venting capacity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11273396B2Mar 15, 2022
Liquid supply system with improved bubble venting capacity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10105732B2Oct 23, 2018
Coater and surface treatment method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42