Inventor

FERNANDEZ DIAZ LAURA MARIA

NL3 patents

Patents

3 patents

US11269259B2Mar 8, 2022

Lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations59

US11086238B2Aug 10, 2021

System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support

ASML NETHERLANDS BV0 citations58

US10871715B2Dec 22, 2020

Lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations48