Inventor
PIJNENBURG JOHANNES ADRIANUS CORNELIS MARIA
NL10 patents
⚠️ This page may combine multiple inventors who share the name “PIJNENBURG JOHANNES ADRIANUS CORNELIS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS11269259B2Mar 8, 2022
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations59
US12474645B2Nov 18, 2025
Object table, stage apparatus, holding method and lithographic apparatus
ASML NETHERLANDS BV0 citations58
US12197139B2Jan 14, 2025
Object holder, tool and method of manufacturing an object holder
ASML NETHERLANDS BV1 citations58
US11086238B2Aug 10, 2021
System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support
ASML NETHERLANDS BV0 citations58
US11287752B2Mar 29, 2022
Cooling apparatus and plasma-cleaning station for cooling apparatus
ASML NETHERLANDS BV0 citations57
US12235592B2Feb 25, 2025
Object holder, electrostatic sheet and method for making an electrostatic sheet
ASML NETHERLANDS BV0 citations56
US11156924B2Oct 26, 2021
Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations56
US10871715B2Dec 22, 2020
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48
US12443115B2Oct 14, 2025
Measurement system and method for characterizing a patterning device
ASML NETHERLANDS BV0 citations47