Inventor

CHERALA ANSHUMAN

US42 patents

⚠️ This page may combine multiple inventors who share the name “CHERALA ANSHUMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHERALA ANSHUMAN

CANON KK

Method of imprinting to correct for a distortion within an imprint system

Adaptive chucking system

Apparatus for use in forming an adaptive layer and a method of using the same

Imprint apparatus and article manufacturing method

Apparatus including a plurality of heads and a method of using the same

Nanoimprint lithography template with peripheral pockets, system of using the template, and method of using the template

Template replication

Systems and methods for curing a shaped film

Template replication

Overlay improvement in nanoimprint lithography

Method and apparatus to improve frame cure imaging resolution for extrusion control

Nanofabrication method with correction of distortion within an imprint system

Real-time correction of template deformation in nanoimprint lithography

Overlay improvement in nanoimprint lithography

System and method for generating control values for overlay control of an imprint tool

Apparatus including a bonding head and a method of using the same

Apparatus and method for optimizing actuator forces

Nanoimprint lithography system and method for adjusting a radiation pattern that compensates for slippage of a template

Systems and methods for curing an imprinted field

Nanofabrication method with correction of distortion within an imprint system

Nanofabrication method with correction of distortion within an imprint system

Imprint apparatus, and method of manufacturing article

MOLECULAR IMPRINTS INC

Partial vacuum environment imprinting

System for varying dimensions of a substrate during nanoscale manufacturing

Apparatus to vary dimensions of a substrate during nano-scale manufacturing

Chucking system for nano-manufacturing

Method of retaining a substrate to a wafer chuck

Method of separating a mold from a solidified layer disposed on a substrate

Chucking system comprising an array of fluid chambers

Method of varying dimensions of a substrate during nano-scale manufacturing

Magnification correction employing out-of-plane distortion of a substrate

Chucking system for nano-manufacturing

Safe separation for nano imprinting

Chucking system comprising an array of fluid chambers

UNIV TEXAS

Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures

Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques

System and method for improvement of alignment and overlay for microlithography

Multi-field overlay control in jet and flash imprint lithography

Applying imprinting material to substrates employing electromagnetic fields

IM SE-HYUK

Safe separation for nano imprinting

CANON NANOTECHNOLOGIES INC

Low contact imprint lithography template chuck system for improved overlay correction

XU FRANK Y

Porous template and imprinting stack for nano-imprint lithography