Inventor
CHEN TUNG-KAI
TW9 patents
Patents
9 patentsUS12327734B2Jun 10, 2025
Chemical mechanical polish slurry and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12300508B2May 13, 2025
Chemical mechanical polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11854827B2Dec 26, 2023
Magnetic slurry for highly efficiency CMP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11373879B2Jun 28, 2022
Chemical mechanical polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11056352B2Jul 6, 2021
Magnetic slurry for highly efficient CMP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11043396B2Jun 22, 2021
Chemical mechanical polish slurry and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12030159B2Jul 9, 2024
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11712778B2Aug 1, 2023
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10777423B2Sep 15, 2020
Chemical mechanical polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51