Inventor
WANG SHANG-YU
TW6 patents
Patents
6 patentsUS12036636B2Jul 16, 2024
Mega-sonic vibration assisted chemical mechanical planarization
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11964358B2Apr 23, 2024
Chemical mechanical polishing apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11590627B2Feb 28, 2023
Mega-sonic vibration assisted chemical mechanical planarization
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10953514B1Mar 23, 2021
Chemical mechanical polishing apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12030159B2Jul 9, 2024
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11712778B2Aug 1, 2023
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58