Inventor
PAN WAN-CHUN
TW10 patents
⚠️ This page may combine multiple inventors who share the name “PAN WAN-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS8889497B2Nov 18, 2014
Semiconductor devices and methods of manufacture thereof
TAIWAN SEMICONDUCTOR MFG22 citations92
US9048087B2Jun 2, 2015
Methods for wet clean of oxide layers over epitaxial layers
TAIWAN SEMICONDUCTOR MFG8 citations83
US9153657B2Oct 6, 2015
Semiconductor devices comprising a fin
TAIWAN SEMICONDUCTOR MFG2 citations62
US9064959B2Jun 23, 2015
Method and apparatus for forming a CMOS device
TAIWAN SEMICONDUCTOR MFG0 citations51
US8853083B2Oct 7, 2014
Chemical mechanical polish in the growth of semiconductor regions
TAIWAN SEMICONDUCTOR MFG0 citations51
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS9592585B2Mar 14, 2017
System and method for CMP station cleanliness
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US10522365B2Dec 31, 2019
Methods for reducing scratch defects in chemical mechanical planarization
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12030159B2Jul 9, 2024
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11712778B2Aug 1, 2023
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US9508716B2Nov 29, 2016
Methods of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41