Inventor
ACHE OLIVER
DE4 patents
⚠️ This page may combine multiple inventors who share the name “ACHE OLIVER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS9704238B2Jul 11, 2017
Method for correcting position measurements for optical errors and method for determining mask writer errors
KLA TENCOR CORP5 citations70
US9201312B2Dec 1, 2015
Method for correcting position measurements for optical errors and method for determining mask writer errors
KLA TENCOR CORP3 citations60
US10337852B1Jul 2, 2019
Method for measuring positions of structures on a substrate and computer program product for determining positions of structures on a substrate
KLA TENCOR CORP1 citations59