Inventor
TAKASAKI TOSHIYUKI
JP6 patents
Patents
6 patentsUS12205823B2Jan 21, 2025
Method for producing element chips
PANASONIC IP MAN CO LTD2 citations72
US12165845B2Dec 10, 2024
Plasma processing apparatus and method for using plasma processing apparatus
PANASONIC IP MAN CO LTD4 citations72
US12230541B2Feb 18, 2025
Element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations50
US11335564B2May 17, 2022
Element chip smoothing method and element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations50
US11219929B2Jan 11, 2022
Element chip cleaning method, element chip cleaning apparatus, and element chip manufacturing method
PANASONIC IP MAN CO LTD0 citations50
US12532706B2Jan 20, 2026
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD0 citations47