Inventor
LAI JEN CHIEH
TW13 patents
Patents
13 patentsUS10170343B1Jan 1, 2019
Post-CMP cleaning apparatus and method with brush self-cleaning function
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations83
US10843307B2Nov 24, 2020
Vacuum assembly for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US11094554B2Aug 17, 2021
Polishing process for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations66
US12409529B2Sep 9, 2025
Vacuum assembly for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11251063B2Feb 15, 2022
Article transporter in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12076831B2Sep 3, 2024
Chemical mechanical polishing apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12009222B2Jun 11, 2024
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11673223B2Jun 13, 2023
Chemical mechanical polishing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11292101B2Apr 5, 2022
Chemical mechanical polishing apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11239092B2Feb 1, 2022
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10804133B2Oct 13, 2020
Article transferring method in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10636673B2Apr 28, 2020
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US11685015B2Jun 27, 2023
Method and system for performing chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49