Inventor

WANG SZU-CHENG

TW3 patents

Patents

3 patents

US10843307B2Nov 24, 2020

Vacuum assembly for chemical mechanical polishing

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70

US12409529B2Sep 9, 2025

Vacuum assembly for chemical mechanical polishing

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61

US11685015B2Jun 27, 2023

Method and system for performing chemical mechanical polishing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49