Inventor
CHU CHUN-JUI
TW6 patents
Patents
6 patentsUS10170343B1Jan 1, 2019
Post-CMP cleaning apparatus and method with brush self-cleaning function
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations83
US10843307B2Nov 24, 2020
Vacuum assembly for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US12409529B2Sep 9, 2025
Vacuum assembly for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12009222B2Jun 11, 2024
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11239092B2Feb 1, 2022
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10636673B2Apr 28, 2020
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50