Inventor
CURTIS BERNARD J
CH4 patents
Patents
4 patentsUS4328068AMay 4, 1982
Method for end point detection in a plasma etching process
RCA CORP80 citations92
US4433044AFeb 21, 1984
Dry developable positive photoresists
RCA CORP24 citations77
US4608118AAug 26, 1986
Reactive sputter etching of metal silicide structures
RCA CORP7 citations70
US4421593ADec 20, 1983
Reverse etching of chromium
RCA CORP8 citations69