Inventor
KULCKE WERNER
DE5 patents
Patents
5 patentsUS4520314AMay 28, 1985
Probe head arrangement for conductor line testing with at least one probe head comprising a plurality of resilient contacts
IBM65 citations93
US4370554AJan 25, 1983
Alignment system for particle beam lithography
IBM33 citations92
US4169230ASep 25, 1979
Method of exposure by means of corpuscular beam shadow printing
IBM33 citations92
US4554458ANov 19, 1985
Electron beam projection lithography
IBM16 citations72
US4334156AJun 8, 1982
Method of shadow printing exposure
IBM14 citations72