Inventor
SHIDA SOICHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHIDA SOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANTEST CORP
5 patentsUS5757198AMay 26, 1998
Method and apparatus for detecting an IC defect using charged particle beam
ADVANTEST CORP63 citations95
US5821761AOct 13, 1998
Apparatus detecting an IC defect by comparing electron emissions from two integrated circuits
ADVANTEST CORP19 citations91
US5592100AJan 7, 1997
Method for detecting an IC defect using charged particle beam
ADVANTEST CORP28 citations91
US5521517AMay 28, 1996
Method and apparatus for detecting an IC defect using a charged particle beam
ADVANTEST CORP27 citations91
US7791022B2Sep 7, 2010
Scanning electron microscope with length measurement function and dimension length measurement method
ADVANTEST CORP3 citations57