Inventor

GELLER ANTHONY S

US5 patents

⚠️ This page may combine multiple inventors who share the name “GELLER ANTHONY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

(unassigned)

1 patent

US5522933AJun 4, 1996

Particle-free microchip processing

28 citations90

SANDIA CORP

1 patent

US6110844AAug 29, 2000

Reduction of particle deposition on substrates using temperature gradient control

SANDIA CORP17 citations81

APPLIED MATERIALS INC

1 patent

US5777245AJul 7, 1998

Particle dispersing system and method for testing semiconductor manufacturing equipment

APPLIED MATERIALS INC9 citations70

DELGADO GILDARDO R

1 patent

US9244368B2Jan 26, 2016

Particle control near reticle and optics using showerhead

DELGADO GILDARDO R3 citations69

KLA TENCOR CORP

1 patent

US9389180B2Jul 12, 2016

Methods and apparatus for use with extreme ultraviolet light having contamination protection

KLA TENCOR CORP2 citations60