Inventor
SLOBODOV ILIA
US57 patents
Patents
50 patentsUS11075058B2Jul 27, 2021
Spatially variable wafer bias power system
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US10985740B2Apr 20, 2021
High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
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High voltage switch with isolated power
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US10892141B2Jan 12, 2021
Nanosecond pulser pulse generation
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US10892140B2Jan 12, 2021
Nanosecond pulser bias compensation
EAGLE HARBOR TECH INC61 citations98
US10811230B2Oct 20, 2020
Spatially variable wafer bias power system
EAGLE HARBOR TECH INC56 citations98
US10796887B2Oct 6, 2020
Efficient nanosecond pulser with source and sink capability for plasma control applications
EAGLE HARBOR TECH INC65 citations98
US10777388B2Sep 15, 2020
Arbitrary waveform generation using digital pulses
EAGLE HARBOR TECH INC61 citations98
US10734906B2Aug 4, 2020
Nanosecond pulser
EAGLE HARBOR TECH INC54 citations98
US10659019B2May 19, 2020
Nanosecond pulser ADC system
EAGLE HARBOR TECH INC72 citations98
US10607814B2Mar 31, 2020
High voltage switch with isolated power
EAGLE HARBOR TECH INC75 citations98
US10483089B2Nov 19, 2019
High voltage resistive output stage circuit
EAGLE HARBOR TECH INC82 citations98
US10460911B2Oct 29, 2019
High voltage resistive output stage circuit
EAGLE HARBOR TECH INC65 citations98
US10460910B2Oct 29, 2019
High voltage resistive output stage circuit
EAGLE HARBOR TECH INC80 citations98
US10382022B2Aug 13, 2019
High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
EAGLE HARBOR TECH INC77 citations98
US10373755B2Aug 6, 2019
High voltage transformer
EAGLE HARBOR TECH INC70 citations98
US10304661B2May 28, 2019
Arbitarary waveform generation using nanosecond pulses
EAGLE HARBOR TECH INC74 citations98
US10224822B2Mar 5, 2019
Nanosecond pulser
EAGLE HARBOR TECH INC87 citations98
US10020800B2Jul 10, 2018
High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
EAGLE HARBOR TECH INC91 citations98
US9706630B2Jul 11, 2017
Galvanically isolated output variable pulse generator disclosure
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US11101108B2Aug 24, 2021
Nanosecond pulser ADC system
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US10991553B2Apr 27, 2021
Nanosecond pulser thermal management
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US10978955B2Apr 13, 2021
Nanosecond pulser bias compensation
EAGLE HARBOR TECH INC54 citations97
US10804886B2Oct 13, 2020
High voltage pre-pulsing
EAGLE HARBOR TECH INC44 citations97
US10847346B2Nov 24, 2020
High voltage resistive output stage circuit
EAGLE HARBOR TECH INC34 citations94
US10282567B2May 7, 2019
High voltage inductive adder
EAGLE HARBOR TECH INC41 citations94
US10268846B2Apr 23, 2019
High voltage inductive adder
EAGLE HARBOR TECH INC40 citations92
US9495563B2Nov 15, 2016
Analog integrator system and method
EAGLE HARBOR TECH INC50 citations92
US11222767B2Jan 11, 2022
Nanosecond pulser bias compensation
EAGLE HARBOR TECH INC8 citations86
US11689107B2Jun 27, 2023
Nanosecond pulser bias compensation
EAGLE HARBOR TECH INC5 citations85
US11302518B2Apr 12, 2022
Efficient energy recovery in a nanosecond pulser circuit
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US11171568B2Nov 9, 2021
Transformer resonant converter
EAGLE HARBOR TECH INC9 citations84
US11810761B2Nov 7, 2023
Nanosecond pulser ADC system
EAGLE HARBOR TECH INC5 citations74
US11404246B2Aug 2, 2022
Nanosecond pulser bias compensation with correction
EAGLE HARBOR TECH INC6 citations74
US11658007B2May 23, 2023
Apparatus and method of generating a waveform
EAGLE HARBOR TECH INC2 citations73
US11587768B2Feb 21, 2023
Nanosecond pulser thermal management
EAGLE HARBOR TECH INC1 citations73
US11551908B2Jan 10, 2023
Spatially variable wafer bias power system
EAGLE HARBOR TECH INC1 citations73
US11303269B2Apr 12, 2022
High voltage pre-pulsing
EAGLE HARBOR TECH INC1 citations72
US11542927B2Jan 3, 2023
Low pressure dielectric barrier discharge plasma thruster
EAGLE HARBOR TECH INC2 citations71
US12555745B2Feb 17, 2026
Apparatus and method of generating a waveform
EAGLE HARBOR TECH INC0 citations63
US11646176B2May 9, 2023
Efficient nanosecond pulser with source and sink capability for plasma control applications
EAGLE HARBOR TECH INC0 citations63
US11631573B2Apr 18, 2023
High voltage resistive output stage circuit
EAGLE HARBOR TECH INC0 citations63
US11502672B2Nov 15, 2022
High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
EAGLE HARBOR TECH INC0 citations63
US11456155B2Sep 27, 2022
High voltage switch with isolated power
EAGLE HARBOR TECH INC0 citations63
US11387076B2Jul 12, 2022
Apparatus and method of generating a waveform
EAGLE HARBOR TECH INC0 citations63
US11250988B2Feb 15, 2022
High voltage transformer
EAGLE HARBOR TECH INC0 citations63
US12230477B2Feb 18, 2025
Nanosecond pulser ADC system
EAGLE HARBOR TECH INC0 citations62
US11962304B2Apr 16, 2024
High voltage pre-pulsing
EAGLE HARBOR TECH INC0 citations62
US11875971B2Jan 16, 2024
Efficient energy recovery in a nanosecond pulser circuit
EAGLE HARBOR TECH INC0 citations62
US11824454B2Nov 21, 2023
Wafer biasing in a plasma chamber
EAGLE HARBOR TECH INC0 citations62
Showing the top 50 of 57 patents by PatentIndex Score.