Inventor · disambiguated record

Lois Illig

Also filed as: ILLIG LOIS

1 granted patent·78 citations·filing 1994–1994

51Inventor score

Technology areasH10P

Files withMEMC ELECTRONIC MATERIALS1

Top patents by PatentIndex Score

1 record

0174US5571373AMethod of rough polishing semiconductor wafers to reduce surface roughnessMEMC ELECTRONIC MATERIALS·Filed 1994·Granted Nov 5, 1996·78 cites·37 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →