Inventor · disambiguated record
Ai-Jen Hung
Also filed as: HUNG AI-JEN
5 granted patents·3 citations·filing 2015–2020
65Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD5
Top patents by PatentIndex Score
5 records- 0171US10831110B2Lithographic overlay correction and lithographic processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 10, 2020·1 cites·19 claims
- 0271US9805154B2Method of lithography process with inserting scattering barsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 31, 2017·2 cites·20 claims
- 0359US11966170B2Lithographic overlay correction and lithographic processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 23, 2024·0 cites·20 claims
- 0441US9733577B2Intra-field process control for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 15, 2017·0 cites·20 claims
- 0535US9588446B2Calibration apparatus and an adjustment method for a lithography apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 7, 2017·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →