Inventor · disambiguated record
Akira Kuibira
Also filed as: KUIBIRA AKIRA
30 granted patents·17 pending applications·1,652 citations·filing 1989–2010
97Inventor score
Top patents by PatentIndex Score
47 records- 0199US7090394B2Temperature gauge and ceramic susceptor in which it is utilizedSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Aug 15, 2006·478 cites·16 claims
- 0299US6963052B2Heater module for semiconductor manufacturing equipmentSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Nov 8, 2005·417 cites·21 claims
- 0398US6460482B1Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Oct 8, 2002·383 cites·37 claims
- 0494US7268322B2Semiconductor heating apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Sep 11, 2007·30 cites·20 claims
- 0592US6554906B1Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Apr 29, 2003·64 cites·42 claims
- 0691US6508884B2Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Jan 21, 2003·48 cites·36 claims
- 0787US6365879B1Wafer holder for semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Apr 2, 2002·40 cites·28 claims
- 0886US6664515B2Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the patternSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Dec 16, 2003·38 cites·8 claims
- 0984US6403510B1Aluminum nitride sintered body and manufacturing method thereofSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Jun 11, 2002·24 cites·11 claims
- 1075US7045045B2Workpiece holder for processing apparatus, and processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted May 16, 2006·14 cites·38 claims
- 1174US7394043B2Ceramic susceptorSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Jul 1, 2008·4 cites·8 claims
- 1274US7361230B2Substrate processing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Apr 22, 2008·17 cites·23 claims
- 1374US7211153B2Ceramic joined body, substrate holding structure and substrate processing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted May 1, 2007·17 cites·22 claims
- 1466US5234642AHigh strength silicon nitride sintered body and process for producing sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1989·Granted Aug 10, 1993·16 cites·11 claims
- 1565US7145106B2Heater module for semiconductor manufacturing equipmentSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Dec 5, 2006·1 cites·20 claims
- 1665US6716304B2Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holderSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Apr 6, 2004·8 cites·20 claims
- 1764US7264699B2Workpiece holder for processing apparatus, and processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Sep 4, 2007·1 cites·4 claims
- 1863US7491432B2Ceramic susceptor for semiconductor manufacturing equipmentSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Feb 17, 2009·11 cites·8 claims
- 1959US7414823B2Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installedSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Aug 19, 2008·6 cites·16 claims
- 2057US6946625B2Ceramic susceptorSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Sep 20, 2005·4 cites·8 claims
- 2156US7090423B2Connecting structuresSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Aug 15, 2006·3 cites·18 claims
- 2254US7806984B2Semiconductor or liquid crystal producing deviceSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Oct 5, 2010·4 cites·9 claims
- 2353US7408131B2Wafer holder and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Aug 5, 2008·0 cites·7 claims
- 2453US7268321B2Wafer holder and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Sep 11, 2007·3 cites·9 claims
- 2553US6806443B2Ceramic susceptorSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Oct 19, 2004·3 cites·8 claims
- 2653US2007068921A1Heater Module for Semiconductor Manufacturing EquipmentSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Application pending·0 cites
- 2752US6653604B2Heater member for mounting heating object and substrate processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Nov 25, 2003·3 cites·19 claims
- 2850US2006201422A1Workpiece Holder for Semiconductor Manufacturing ApparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Application pending·0 cites
- 2949US7999210B2Heating device for manufacturing semiconductorSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Aug 16, 2011·2 cites·8 claims
- 3049US7837798B2Semiconductor processing apparatus with a heat resistant hermetically sealed substrate supportSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Nov 23, 2010·2 cites·9 claims
- 3146US2010242844A1Holder for semiconductor manufacturing equipmentSUMITONO ELECTRIC IND LTD·Filed 2010·Application pending·0 cites
- 3244US2009126903A1Heat transfer member, convex structural member, electronic apparatus, and electric productSUMITOMO ELECTRIC INDUSTRIES·Filed 2007·Application pending·0 cites
- 3343US2006201918A1Heater for semiconductor manufacturing deviceSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Application pending·0 cites
- 3442US5922629ASilicon nitride ceramic sliding material and process for producing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1997·Granted Jul 13, 1999·7 cites·6 claims
- 3542US2006102613A1Semiconductor fabrication device heater and heating device equipped with the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
- 3642US2006289448A1Heater for semiconductor manufacturing device and heating device equipped with the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
- 3742US2005160989A1Workpiece holder for semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Application pending·0 cites
- 3842US2004182321A1Holder for semiconductor production systemFiled 2003·Application pending·0 cites
- 3941US2005263516A1Heating deviceSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
- 4040US2005253285A1Supporting unit for semiconductor manufacturing device and semiconductor manufacturing device with supporting unit installedSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
- 4140US2004169033A1Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installedSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Application pending·0 cites
- 4239US5328876AHigh strength silicon nitride sintered body and process for producing sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1992·Granted Jul 12, 1994·4 cites·2 claims
- 4339US2003066608A1Semiconductor processing apparatus and electrode member thereforSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Application pending·0 cites
- 4439US2005166848A1Wafer holder and semiconductor manufacturing apparatusFiled 2003·Application pending·0 cites
- 4534US2005241584A1Ceramics heater for semiconductor production systemSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Application pending·0 cites
- 4632US2005167422A1Ceramics heater for semiconductor production systemFiled 2003·Application pending·0 cites
- 4732US2005184054A1Ceramics heater for semiconductor production systemFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →