Inventor · disambiguated record
Akira Matumoto
Also filed as: MATUMOTO AKIRA
7 granted patents·3 pending applications·167 citations·filing 1995–2004
87Inventor score
Top patents by PatentIndex Score
10 records- 0183US6876064B2Semiconductor device having superior resistance to moistureNEC ELECTRONICS CORP·Filed 2004·Granted Apr 5, 2005·36 cites·14 claims
- 0275US6197452B1Light exposure pattern mask with dummy patterns and production method of the sameNEC CORP·Filed 1998·Granted Mar 6, 2001·38 cites·27 claims
- 0371US6165899AMethod for manufacturing semiconductor devices having dual damascene structureNEC CORP·Filed 1998·Granted Dec 26, 2000·44 cites·16 claims
- 0464US7019400B2Semiconductor device having multilayer interconnection structure and method for manufacturing the deviceNEC ELECTRONICS CORP·Filed 2004·Granted Mar 28, 2006·12 cites·18 claims
- 0556US5804862ASemiconductor device having contact hole open to impurity region coplanar with buried isolating regionNEC CORP·Filed 1996·Granted Sep 8, 1998·21 cites·13 claims
- 0642US2003204832A1Automatic generation method of dummy patternsNEC ELECTRONICS CORP·Filed 2003·Application pending·0 cites
- 0739US5893749AMethod for forming a hole filling plug for a semiconductor deviceNEC CORP·Filed 1995·Granted Apr 13, 1999·10 cites·5 claims
- 0837US2004155350A1Semiconductor device having multi-layer interconnection structureFiled 2004·Application pending·0 cites
- 0935US5972774AProcess for fabricating a semiconductor device having contact hole open to impurity region coplanar with buried isolating regionNEC CORP·Filed 1997·Granted Oct 26, 1999·6 cites·9 claims
- 1034US2002081840A1Method of manufacturing a semiconductor device including dual-damascene processNEC CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →