Inventor · disambiguated record
Akira Mikumo
Also filed as: MIKUMO AKIRA
15 granted patents·9 pending applications·49 citations·filing 1994–2023
90Inventor score
Top patents by PatentIndex Score
24 records- 0185US7554059B2Heater unit and semiconductor manufacturing apparatus including the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Jun 30, 2009·10 cites·21 claims
- 0279US11127605B2Wafer holderSUMITOMO ELECTRIC INDUSTRIES·Filed 2017·Granted Sep 21, 2021·2 cites·6 claims
- 0368US10886157B2Wafer holding unitSUMITOMO ELECTRIC INDUSTRIES·Filed 2016·Granted Jan 5, 2021·1 cites·8 claims
- 0468US2023340668A1Wafer holderSUMITOMO ELECTRIC INDUSTRIES·Filed 2023·Application pending·0 cites
- 0566US12046488B2Semiconductor manufacturing apparatus and wafer holding table for semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2021·Granted Jul 23, 2024·0 cites·18 claims
- 0660US12033880B2Wafer holding bodySUMITOMO ELECTRIC INDUSTRIES·Filed 2020·Granted Jul 9, 2024·0 cites·20 claims
- 0758US6493925B1Manufacturing method of superconducting wireSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Dec 17, 2002·7 cites·11 claims
- 0857US5507924AMethod and apparatus for adjusting sectional area ratio of metal-covered electric wireSUMITOMO ELECTRIC INDUSTRIES·Filed 1994·Granted Apr 16, 1996·14 cites·33 claims
- 0956US2010044364A1Heating unit and the apparatus having the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2009·Application pending·0 cites
- 1050US11732359B2Wafer holderSUMITOMO ELECTRIC INDUSTRIES·Filed 2018·Granted Aug 22, 2023·0 cites·10 claims
- 1150US2007062929A1Heating unit and the apparatus having the sameMIKUMO AKIRA·Filed 2006·Application pending·0 cites
- 1246US11239057B2Showerhead and method for manufacturing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2018·Granted Feb 1, 2022·0 cites·9 claims
- 1345US12063721B2HeaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2020·Granted Aug 13, 2024·0 cites·20 claims
- 1445US11195701B2ShowerheadSUMITOMO ELECTRIC INDUSTRIES·Filed 2018·Granted Dec 7, 2021·0 cites·8 claims
- 1544US2007215602A1Heating and cooling moduleSUMITOMO ELECTRIC INDUSTRIES·Filed 2007·Application pending·0 cites
- 1643US2007054424A1Semiconductor heating heater holder and semiconductor manufacturing apparatusNATSUHARA MASUHIRO·Filed 2006·Application pending·0 cites
- 1742US2007029740A1Body for keeping a wafer, method of manufacturing the same and device using the sameNATSUHARA MASUHIRO·Filed 2006·Application pending·0 cites
- 1842US2006102613A1Semiconductor fabrication device heater and heating device equipped with the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
- 1942US2007069174A1Composite and susceptor for semiconductor manufacturing device and power module with the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Application pending·0 cites
- 2038US5602488AMethod and apparatus for adjusting sectional area ratio of metal-covered electric wireSUMITOMO ELECTRIC INDUSTRIES·Filed 1996·Granted Feb 11, 1997·6 cites·5 claims
- 2137US6777376B1Superconducting wireSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Aug 17, 2004·0 cites·7 claims
- 2237US2011139399A1Heater unit, heating and cooling device, and apparatus comprising sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2010·Application pending·0 cites
- 2332US5779864AApparatus for adjusting sectional area ratio of metal-covered electric wireSUMITOMO ELECTRIC INDUSTRIES·Filed 1997·Granted Jul 14, 1998·3 cites·1 claims
- 2431US5891585ANb3 Al multi-filamentary superconducting wireSUMITOMO ELKECTRIC IND LTD·Filed 1996·Granted Apr 6, 1999·6 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →