Inventor · disambiguated record
Akihisa Nagano
Also filed as: NAGANO AKIHISA
4 granted patents·1 pending application·0 citations·filing 2015–2022
51Inventor score
Files withUSHIO ELECTRIC INC5
Top patents by PatentIndex Score
5 records- 0134US2023049650A1Storage and drainage mechanism, light source apparatus, and storage and drainage methodUSHIO ELECTRIC INC·Filed 2022·Application pending·0 cites
- 0231US10609802B2High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatusUSHIO ELECTRIC INC·Filed 2017·Granted Mar 31, 2020·0 cites·10 claims
- 0331US10591342B2Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source deviceUSHIO ELECTRIC INC·Filed 2015·Granted Mar 17, 2020·0 cites·17 claims
- 0426US10285253B2Discharge electrodes and light source deviceUSHIO ELECTRIC INC·Filed 2016·Granted May 7, 2019·0 cites·20 claims
- 0524US10143075B2Device for emitting extreme ultraviolet lightUSHIO ELECTRIC INC·Filed 2016·Granted Nov 27, 2018·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →