Inventor · disambiguated record
Akihiko Nara
Also filed as: NARA AKIHIKO
3 granted patents·33 citations·filing 2000–2000
70Inventor score
Files withOKI ELECTRIC IND CO LTD3
Top patents by PatentIndex Score
3 records- 0167US6654107B1Stepper lens aberration measurement pattern and stepper lens aberration characteristics evaluating methodOKI ELECTRIC IND CO LTD·Filed 2000·Granted Nov 25, 2003·13 cites·12 claims
- 0267US6455438B1Fabrication method for a semiconductor deviceOKI ELECTRIC IND CO LTD·Filed 2000·Granted Sep 24, 2002·14 cites·12 claims
- 0357US6490026B1Method and system for aligning object to be processed with predetermined target articleOKI ELECTRIC IND CO LTD·Filed 2000·Granted Dec 3, 2002·6 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →