Inventor · disambiguated record
Akira Oato
Also filed as: OATO AKIRA
2 granted patents·1 pending application·2 citations·filing 2018–2018
37Inventor score
Technology areasH10P
Files withSCREEN HOLDINGS CO LTD3
Top patents by PatentIndex Score
3 records- 0167US10843223B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Nov 24, 2020·1 cites·2 claims
- 0263US11121008B2Method of processing substrate and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 14, 2021·1 cites·9 claims
- 0335US2019088469A1Method of processing substrate and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →