Inventor · disambiguated record
Akinori Ohkubo
Also filed as: OHKUBO AKINORI
17 granted patents·2 pending applications·86 citations·filing 2001–2014
91Inventor score
Top patents by PatentIndex Score
19 records- 0190US7304749B2Point diffraction interferometer and exposure apparatus and method using the sameCANON KK·Filed 2005·Granted Dec 4, 2007·13 cites·8 claims
- 0290US6590857B2Optical diskPIONEER CORP·Filed 2001·Granted Jul 8, 2003·31 cites·2 claims
- 0388US7295327B2Measuring apparatus and exposure apparatus having the sameCANON KK·Filed 2005·Granted Nov 13, 2007·11 cites·21 claims
- 0484US9091614B2Wavefront optical measuring apparatusOHKUBO AKINORI·Filed 2011·Granted Jul 28, 2015·7 cites·14 claims
- 0578US8085384B2Exposure apparatusOHKUBO AKINORI·Filed 2007·Granted Dec 27, 2011·5 cites·6 claims
- 0673US7379151B2Exposure apparatus comprising cleaning apparatus for cleaning mask with laser beamCANON KK·Filed 2006·Granted May 27, 2008·3 cites·11 claims
- 0772US7199939B2Immersion optical system and optical apparatus having the sameCANON KK·Filed 2005·Granted Apr 3, 2007·6 cites·6 claims
- 0867US8009272B2Method and device for image measurement, exposure apparatus, substrate for image measurement, and device manufacturing methodCANON KK·Filed 2008·Granted Aug 30, 2011·2 cites·11 claims
- 0966US9182289B2Apparatus and method for estimating wavefront parametersBARRETT HARRISON·Filed 2012·Granted Nov 10, 2015·3 cites·3 claims
- 1059US8223313B2Light intensity distribution measurement apparatus and measurement method, and exposure apparatusOHKUBO AKINORI·Filed 2009·Granted Jul 17, 2012·1 cites·8 claims
- 1156US8139215B2Method for measuring polarization characteristics and measurement apparatusOHKUBO AKINORI·Filed 2009·Granted Mar 20, 2012·2 cites·7 claims
- 1255US7190642B2Focus servo devicePIONEER CORP·Filed 2003·Granted Mar 13, 2007·2 cites·5 claims
- 1350US7414240B2Particle remover, exposure apparatus having the same, and device manufacturing methodCANON KK·Filed 2005·Granted Aug 19, 2008·0 cites·12 claims
- 1449US7929113B2Measurement apparatus, measurement method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2009·Granted Apr 19, 2011·0 cites·10 claims
- 1547US7911585B2Measurement apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Mar 22, 2011·0 cites·10 claims
- 1644US8314938B2Method and apparatus for measuring surface profile of an objectOHKUBO AKINORI·Filed 2010·Granted Nov 20, 2012·0 cites·16 claims
- 1742US2015073752A1Wavefront measuring apparatus, wavefront measuring method, method of manufacturing optical element, and assembly adjustment apparatus of optical systemCANON KK·Filed 2014·Application pending·0 cites
- 1840US7200077B2Tilt angle detection device and method utilizing pattern identificationPIONEER CORP·Filed 2003·Granted Apr 3, 2007·0 cites·12 claims
- 1938US2004136281A1Information reproducing apparatus and optical recording mediumFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →