Inventor · disambiguated record
Akshay V. Shah
Also filed as: SHAH AKSHAY V
3 granted patents·58 citations·filing 1992–1994
72Inventor score
Top patents by PatentIndex Score
3 records- 0162US5298117AEtching of copper-containing devicesAT & T BELL LAB·Filed 1993·Granted Mar 29, 1994·35 cites·7 claims
- 0246US5326671AMethod of making circuit devices comprising a dielectric layer of siloxane-caprolactoneAT & T BELL LAB·Filed 1992·Granted Jul 5, 1994·17 cites·8 claims
- 0332US5620558AEtching of copper-containing devicesLUCENT TECHNOLOGIES INC·Filed 1994·Granted Apr 15, 1997·6 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →