Inventor · disambiguated record
Akihiko Taki
Also filed as: TAKI AKIHIKO
7 granted patents·2 pending applications·10 citations·filing 2012–2022
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0183US10777404B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Sep 15, 2020·4 cites·6 claims
- 0279US10192771B2Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Jan 29, 2019·4 cites·17 claims
- 0373US10720320B2Substrate processing method and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2016·Granted Jul 21, 2020·2 cites·8 claims
- 0457US11031235B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Granted Jun 8, 2021·0 cites·4 claims
- 0552US2023031209A1Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2022·Application pending·0 cites
- 0639US10199243B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Feb 5, 2019·0 cites·12 claims
- 0738US11195731B2Substrate processing device, substrate processing method, and substrate processing systemSCREEN HOLDINGS CO LTD·Filed 2017·Granted Dec 7, 2021·0 cites·23 claims
- 0833US9892955B2Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Feb 13, 2018·0 cites·14 claims
- 0930US2013014787A1Substrate processing apparatus and substrate processing methodURATA SHINGO·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →