Inventor · disambiguated record
Akira Tokuhisa
Also filed as: TOKUHISA AKIRA
24 granted patents·4 pending applications·74 citations·filing 2004–2025
93Inventor score
Top patents by PatentIndex Score
28 records- 0192US7623557B2Wavelength converting optical system, laser light source, exposure apparatus, mask examining apparatus, and macromolecular crystal lens machining deviceNIKON CORP·Filed 2006·Granted Nov 24, 2009·23 cites·11 claims
- 0291US7339961B2Wavelength converting optical system, laser light source, exposure apparatus, device for inspecting object of inspection, and polymer crystal working apparatusNIKON CORP·Filed 2006·Granted Mar 4, 2008·25 cites·14 claims
- 0389US11757247B2Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation deviceNIKON CORP·Filed 2021·Granted Sep 12, 2023·1 cites·20 claims
- 0482US11867621B2Terahertz light detector and terahertz measurement deviceNIKON CORP·Filed 2020·Granted Jan 9, 2024·1 cites·20 claims
- 0580US8780946B2Ultraviolet laser deviceTOKUHISA AKIRA·Filed 2011·Granted Jul 15, 2014·5 cites·7 claims
- 0675US9608400B2Laser device, and exposure device and inspection device provided with laser deviceNIKON CORP·Filed 2013·Granted Mar 28, 2017·3 cites·15 claims
- 0774US8988768B2Laser deviceTOKUHISA AKIRA·Filed 2012·Granted Mar 24, 2015·3 cites·17 claims
- 0873US10044160B2Pulsed light generating method, pulse laser apparatus, exposure apparatus having pulse laser apparatus, and inspection apparatus having pulse laser apparatusNIKON CORP·Filed 2016·Granted Aug 7, 2018·1 cites·20 claims
- 0970US7298546B2Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light sourceNIKON CORP·Filed 2005·Granted Nov 20, 2007·3 cites·12 claims
- 1067US11303091B2Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation deviceNIKON CORP·Filed 2020·Granted Apr 12, 2022·0 cites·36 claims
- 1165US10559937B2Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation deviceNIKON CORP·Filed 2018·Granted Feb 11, 2020·0 cites·28 claims
- 1265US2024113491A1Light amplification apparatus and light amplification methodNIKON CORP·Filed 2023·Application pending·0 cites
- 1363US2025279624A1Optical device, optical machining device, microscope device, and scanning methodNIKON CORP·Filed 2025·Application pending·0 cites
- 1462US9083151B2Method for having laser light source in standby statusTOKUHISA AKIRA·Filed 2011·Granted Jul 14, 2015·1 cites·5 claims
- 1561US9160132B2Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatusTAKADA YASUTOSHI·Filed 2011·Granted Oct 13, 2015·3 cites·8 claims
- 1660US8792083B2Seed light generation device, light source device, adjustment method thereof, light irradiation device, exposure device, and device manufacturing methodTOKUHISA AKIRA·Filed 2010·Granted Jul 29, 2014·1 cites·9 claims
- 1757US9153934B2Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatusTAKADA YASUTOSHI·Filed 2011·Granted Oct 6, 2015·1 cites·13 claims
- 1855US2009152476A1Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment deviceNIKON CORP·Filed 2009·Application pending·0 cites
- 1953US7397598B2Light source unit and light irradiation unitNIKON CORP·Filed 2004·Granted Jul 8, 2008·3 cites·20 claims
- 2052US11366070B2Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation deviceNIKON CORP·Filed 2018·Granted Jun 21, 2022·0 cites·31 claims
- 2151US8542436B2Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment deviceTOKUHISA AKIRA·Filed 2012·Granted Sep 24, 2013·0 cites·9 claims
- 2251US7974320B2Method for having laser light source in standby statusNIKON CORP·Filed 2006·Granted Jul 5, 2011·0 cites·9 claims
- 2351US2025020969A1Pulsed light generation device, pulsed light generation method, and processing deviceNIKON CORP·Filed 2022·Application pending·0 cites
- 2444US9383653B2Ultraviolet laser device, and exposure device and inspection device provided with ultraviolet laser deviceNIKON CORP·Filed 2013·Granted Jul 5, 2016·0 cites·13 claims
- 2543US9172204B2Method for adjusting electro-optic modulator in laser device, and laser deviceTOKUHISA AKIRA·Filed 2012·Granted Oct 27, 2015·0 cites·6 claims
- 2642US9882340B2Laser device, and exposure device and inspection device provided with the laser deviceNIPPON KOGAKU KK·Filed 2016·Granted Jan 30, 2018·0 cites·19 claims
- 2741US7369731B2Optical fiber for amplification, optical amplifying apparatus, light source apparatus, photo-therapy apparatus, and exposure apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted May 6, 2008·0 cites·9 claims
- 2836US8929410B2Ultraviolet laser deviceOSHITA YOSHINORI·Filed 2012·Granted Jan 6, 2015·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →