Inventor · disambiguated record
Alois Goller
Also filed as: GOLLER ALOIS
4 granted patents·3 pending applications·17 citations·filing 2012–2021
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0188US10861719B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2020·Granted Dec 8, 2020·2 cites·11 claims
- 0288US10720343B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2016·Granted Jul 21, 2020·5 cites·21 claims
- 0381US9146007B2Apparatus for liquid treatment of work pieces and flow control system for use in sameLAM RES AG·Filed 2012·Granted Sep 29, 2015·10 cites·15 claims
- 0448US2024030050A1Apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2021·Application pending·0 cites
- 0534US12217980B2Apparatus for processing a wafer, and method of controlling such an apparatusLAM RES AG·Filed 2020·Granted Feb 4, 2025·0 cites·18 claims
- 0632US2013284208A1Method and apparatus for liquid treatment of wafer-shaped articlesZAGORZ PHILIPP·Filed 2012·Application pending·0 cites
- 0732US2013260569A1Apparatus and method for liquid treatment of wafer-shaped articlesGANSTER MICHAEL·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →