Inventor · disambiguated record
Alfred Mike Halling
Also filed as: HALLING ALFRED M · HALLING ALFRED MIKE
4 granted patents·1 pending application·79 citations·filing 1998–2016
76Inventor score
Technology areasH01J
Top patents by PatentIndex Score
5 records- 0184US5998798AIon dosage measurement apparatus for an ion beam implanter and methodEATON CORP·Filed 1998·Granted Dec 7, 1999·54 cites·19 claims
- 0274US6600163B2In-process wafer charge monitor and control system for ion implanterFiled 2000·Granted Jul 29, 2003·18 cites·17 claims
- 0373US10395889B2In situ beam current monitoring and control in scanned ion implantation systemsAXCELIS TECH INC·Filed 2016·Granted Aug 27, 2019·2 cites·23 claims
- 0458US6984832B2Beam angle control in a batch ion implantation systemAXCELIS TECH INC·Filed 2004·Granted Jan 10, 2006·5 cites·31 claims
- 0533US2004227106A1System and methods for ion beam containment using localized electrostatic fields in an ion beam passagewayFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →