Inventor · disambiguated record
Albert Kreh
Also filed as: KREH ALBERT
13 granted patents·6 pending applications·144 citations·filing 2003–2010
92Inventor score
Top patents by PatentIndex Score
19 records- 0186US7460219B2Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offsetVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Granted Dec 2, 2008·18 cites·17 claims
- 0282US7248354B2Apparatus for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Jul 24, 2007·21 cites·27 claims
- 0378US6812446B2Autofocus module for microscope-based systemsLEICA MICROSYSTEMS·Filed 2003·Granted Nov 2, 2004·20 cites·11 claims
- 0477US7224446B2Apparatus, method, and computer program for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted May 29, 2007·15 cites·24 claims
- 0576US7180585B2Apparatus for wafer inspectionLEICA MICROSYSTEMS·Filed 2004·Granted Feb 20, 2007·14 cites·21 claims
- 0675US7327450B2Apparatus for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Feb 5, 2008·12 cites·23 claims
- 0774US8451440B2Apparatus for the optical inspection of wafersHAHN KURT·Filed 2010·Granted May 28, 2013·4 cites·35 claims
- 0873US7602481B2Method and apparatus for inspecting a surfaceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Granted Oct 13, 2009·3 cites·19 claims
- 0969US7292328B2Method for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Nov 6, 2007·8 cites·18 claims
- 1066US7265823B2System for the detection of macrodefectsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Sep 4, 2007·14 cites·12 claims
- 1166US6875972B2Autofocus module for microscope-based systemsLEICA MICROSYSTEMS·Filed 2003·Granted Apr 5, 2005·10 cites·30 claims
- 1260US7307713B2Apparatus and method for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Dec 11, 2007·3 cites·20 claims
- 1345US2006279729A1Method of inspecting semiconductor wafers taking the SAW design into accountVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 1444US7424393B2Wafer inspection deviceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Sep 9, 2008·2 cites·13 claims
- 1543US2006262295A1Apparatus and method for inspecting a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 1643US2005280808A1Method and system for inspecting a waferLEICA MICROSYSTEMS·Filed 2005·Application pending·0 cites
- 1743US2005280807A1Method and system for inspecting a waferLEICA MICROSYSTEMS·Filed 2005·Application pending·0 cites
- 1842US2007013902A1Apparatus for Inspecting a WaferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 1940US2007064224A1Method and device for inspecting a waferKREH ALBERT·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →