Inventor · disambiguated record
Alan Sheng
Also filed as: SHENG ALAN · SHENG ALAN P
2 granted patents·2 pending applications·7 citations·filing 2002–2006
52Inventor score
Top patents by PatentIndex Score
4 records- 0157US6995381B2System and method for multi-wafer scanning in ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2003·Granted Feb 7, 2006·5 cites·20 claims
- 0248US7019315B2System and method for serial ion implanting productivity enhancementsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Mar 28, 2006·2 cites·13 claims
- 0333US2003122088A1Scan methods and apparatus for ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Application pending·0 cites
- 0433US2006258128A1Methods and apparatus for enabling multiple process steps on a single substrateNUNAN PETER·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →