Inventor · disambiguated record
Antony Bourdillon
Also filed as: BOURDILLON ANTONY · BOURDILLON ANTONY J
2 granted patents·1 pending application·19 citations·filing 2000–2003
59Inventor score
Top patents by PatentIndex Score
3 records- 0153US6953643B2Mask shaping using temporal and spatial coherence in ultra high resolution lithographyBOURDILLON ANTONY J·Filed 2002·Granted Oct 11, 2005·8 cites·4 claims
- 0250US6383697B1Ultra high resolution lithographic imaging and printing and defect reduction by exposure near the critical condition utilizing fresnel diffractionUNIV SINGAPORE·Filed 2000·Granted May 7, 2002·11 cites·18 claims
- 0326US2004009417A1Method for making fine prints from oscillations in fresnel diffraction patterns in ultra high resolution lithographyFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →