Inventor · disambiguated record
An Ki Cha
Also filed as: CHA AN KI
1 granted patent·2 pending applications·2 citations·filing 2009–2014
19Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0146US2015083331A1Process Chamber, Semiconductor Manufacturing Apparatus and Substrate Processing Method Having the SameLEE YONG HYUN·Filed 2014·Application pending·0 cites
- 0244US8752580B2Vacuum chamber for processing substrate and apparatus including the sameCHOI HYUN-BUM·Filed 2009·Granted Jun 17, 2014·2 cites·19 claims
- 0339US2011226419A1Process Chamber, Semiconductor Manufacturing Apparatus and Substrate Processing Method Having the SameLEE YONG HYUN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →