Inventor · disambiguated record
Anne-Marie Goethals
Also filed as: GOETHALS ANNE-MARIE
3 granted patents·1 pending application·8 citations·filing 2007–2011
60Inventor score
Technology areasG03F
Top patents by PatentIndex Score
4 records- 0177US7750319B2Method and system for measuring contamination of a lithographical elementIMEC·Filed 2007·Granted Jul 6, 2010·6 cites·24 claims
- 0260US8006202B2Systems and methods for UV lithographyIMEC·Filed 2008·Granted Aug 23, 2011·1 cites·25 claims
- 0359US9086638B2Detection of contamination in EUV systemsJONCKHEERE RIK·Filed 2011·Granted Jul 21, 2015·1 cites·19 claims
- 0451US2009103069A1Detection of contamination in euv systemsIMEC INTER UNI MICRO ELECTR·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →