Inventor · disambiguated record
Andrew M. Ray
Also filed as: RAY ANDREW E · RAY ANDREW M · RAY ANDREW MICHAEL
18 granted patents·4 pending applications·500 citations·filing 1986–2009
95Inventor score
Top patents by PatentIndex Score
22 records- 0193US5229615AEnd station for a parallel beam ion implanterEATON CORP·Filed 1992·Granted Jul 20, 1993·109 cites·10 claims
- 0289US6903350B1Ion beam scanning systems and methods for improved ion implantation uniformityAXCELIS TECH INC·Filed 2004·Granted Jun 7, 2005·46 cites·45 claims
- 0388US5091655AReduced path ion beam implanterEATON CORP·Filed 1991·Granted Feb 25, 1992·64 cites·19 claims
- 0485US6953942B1Ion beam utilization during scanned ion implantationAXCELIS TECH INC·Filed 2004·Granted Oct 11, 2005·32 cites·20 claims
- 0580US7994487B2Control of particles on semiconductor wafers when implanting boron hydridesAXCELIS TECH INC·Filed 2009·Granted Aug 9, 2011·5 cites·8 claims
- 0680US5160846AMethod and apparatus for reducing tilt angle variations in an ion implanterEATON CORP·Filed 1991·Granted Nov 3, 1992·38 cites·11 claims
- 0780US4943728ABeam pattern control system for an ion implanterEATON CORP·Filed 1989·Granted Jul 24, 1990·24 cites·12 claims
- 0875US7417242B2Method of measuring ion beam positionAXCELIS TECH INC·Filed 2006·Granted Aug 26, 2008·5 cites·20 claims
- 0975US5406088AScan and tilt apparatus for an ion implanterEATON CORP·Filed 1993·Granted Apr 11, 1995·30 cites·4 claims
- 1075US4975586AIon implanter end stationEATON CORP·Filed 1989·Granted Dec 4, 1990·44 cites·12 claims
- 1170US6989545B1Device and method for measurement of beam angle and divergenceAXCELIS TECH INC·Filed 2004·Granted Jan 24, 2006·13 cites·25 claims
- 1270US6881967B1Method of correction for wafer crystal cut error in semiconductor processingAXCELIS TECH INC·Filed 2004·Granted Apr 19, 2005·13 cites·24 claims
- 1367US7453160B2Simplified wafer alignmentAXCELIS TECH INC·Filed 2004·Granted Nov 18, 2008·11 cites·15 claims
- 1464US6992308B2Modulating ion beam currentAXCELIS TECH INC·Filed 2004·Granted Jan 31, 2006·9 cites·22 claims
- 1562US7697617B2Synchronisation method and apparatus for OFDM symbols4I2I COMM LTD·Filed 2004·Granted Apr 13, 2010·11 cites·12 claims
- 1661US4929840AWafer rotation control for an ion implanterEATON CORP·Filed 1989·Granted May 29, 1990·26 cites·6 claims
- 1751US4700077AIon beam implanter control systemEATON CORP·Filed 1986·Granted Oct 13, 1987·18 cites·13 claims
- 1849US6940079B2Method of correction for wafer crystal cut error in semiconductor processingAXCELIS TECH INC·Filed 2004·Granted Sep 6, 2005·2 cites·8 claims
- 1949US2006243920A1Optimization of a utilization of an ion beam in a two-dimensional mechanical scan ion implantation systemRAY ANDREW M·Filed 2006·Application pending·0 cites
- 2043US2006113489A1Optimization of beam utilizationAXCELIS TECH INC·Filed 2004·Application pending·0 cites
- 2140US2006097196A1Dose uniformity during scanned ion implantationAXCELIS TECH INC·Filed 2004·Application pending·0 cites
- 2239US2006061662A1Communication device with image transmission operation and method thereofRAY ANDREW E·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →