Inventor · disambiguated record
Anthony Sayka
Also filed as: SAYKA ANTHONY
15 granted patents·357 citations·filing 1992–2000
94Inventor score
Top patents by PatentIndex Score
15 records- 0177US5668452AMagnetic sensing robotics for automated semiconductor wafer processing systemsVLSI TECHNOLOGY INC·Filed 1996·Granted Sep 16, 1997·70 cites·16 claims
- 0272US6766813B1Apparatus and method for cleaning a waferUNIV TEXAS·Filed 2000·Granted Jul 27, 2004·24 cites·23 claims
- 0372US5349237AIntegrated circuit package including a heat pipeVLSI TECHNOLOGY INC·Filed 1992·Granted Sep 20, 1994·51 cites·9 claims
- 0471US5743135AOptical-fiber liquid-level monitorVLSI TECHNOLOGY INC·Filed 1995·Granted Apr 28, 1998·56 cites·2 claims
- 0559US5477409AFusion heat sink for integrated circuitVLSI TECHNOLOGY INC·Filed 1993·Granted Dec 19, 1995·24 cites·1 claims
- 0657US5284801AMethods of moisture protection in semiconductor devices utilizing polyimides for inter-metal dielectricVLSI TECHNOLOGY INC·Filed 1992·Granted Feb 8, 1994·28 cites·6 claims
- 0756US5472825AMetal interconnect fabrication with dual plasma silicon dioxide deposition and etchbackVLSI TECHNOLOGY INC·Filed 1993·Granted Dec 5, 1995·24 cites·5 claims
- 0854US5312039AElectro-optic monitor for fluid spray patternVLSI TECHNOLOGY INC·Filed 1992·Granted May 17, 1994·25 cites·15 claims
- 0951US5392113ASemiconductor wafer defect monitoringVLSI TECHNOLOGY INC·Filed 1992·Granted Feb 21, 1995·17 cites·21 claims
- 1046US5631799AFusion heat sink for integrated circuitVLSI TECHNOLOGY INC·Filed 1995·Granted May 20, 1997·12 cites·9 claims
- 1142US5310621ASemiconductor photolithography with superficial plasma etchVLSI TECHNOLOGY INC·Filed 1992·Granted May 10, 1994·6 cites·16 claims
- 1239US5509375AApparatus and method for detecting contaminants carried by a fluidVLSI TECHNOLOGY INC·Filed 1994·Granted Apr 23, 1996·10 cites·12 claims
- 1332US5772769AApparatus for coating a workpiece with fluid contamination detectionVLSI TECHNOLOGY INC·Filed 1996·Granted Jun 30, 1998·2 cites·13 claims
- 1427US5558902AMethod for detecting contaminants carried by a fluidVLSI TECHNOLOGY INC·Filed 1995·Granted Sep 24, 1996·1 cites·8 claims
- 1524US5313818AContaminant monitor for a flowing liquidVLSI TECHNOLOGY INC·Filed 1992·Granted May 24, 1994·7 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →