Inventor · disambiguated record
Arnd Kaelberer
Also filed as: KAELBERER ARND
20 granted patents·4 pending applications·44 citations·filing 2003–2025
91Inventor score
Top patents by PatentIndex Score
24 records- 0193US9709451B2Micromechanical pressure sensor device and corresponding manufacturing methodBOSCH GMBH ROBERT·Filed 2015·Granted Jul 18, 2017·7 cites·14 claims
- 0280US8461833B2Method for determining the sensitivity of an acceleration sensor or magnetic field sensorCLASSEN JOHANNES·Filed 2010·Granted Jun 11, 2013·6 cites·11 claims
- 0376US10020169B2Etching device and etching methodBOSCH GMBH ROBERT·Filed 2017·Granted Jul 10, 2018·1 cites·11 claims
- 0476US9958348B2Micromechanical pressure sensor device and corresponding manufacturing methodBOSCH GMBH ROBERT·Filed 2014·Granted May 1, 2018·3 cites·11 claims
- 0576US8272268B2Triaxial acceleration sensorCLASSEN JOHANNES·Filed 2009·Granted Sep 25, 2012·8 cites·12 claims
- 0672US9097736B2Micromechanical component and method for manufacturing a micromechanical componentBOSCH GMBH ROBERT·Filed 2012·Granted Aug 4, 2015·2 cites·11 claims
- 0770US7919346B2Micromechanical component and manufacturing methodBOSCH GMBH ROBERT·Filed 2006·Granted Apr 5, 2011·5 cites·6 claims
- 0869US9156675B2Micromechanical component and manufacturing method for a micromechanical componentKAELBERER ARND·Filed 2014·Granted Oct 13, 2015·2 cites·26 claims
- 0968US7878061B2Micromechanical system including a suspension and an electrode positioned movablyBOSCH GMBH ROBERT·Filed 2008·Granted Feb 1, 2011·5 cites·11 claims
- 1064US2024085661A1Microelectromechanical Apparatus with Heating ElementBOSCH GMBH ROBERT·Filed 2023·Application pending·0 cites
- 1162US8336382B2Acceleration sensor and method for its manufactureCLASSEN JOHANNES·Filed 2009·Granted Dec 25, 2012·3 cites·10 claims
- 1261US9790084B2Micromechanical sensor deviceBOSCH GMBH ROBERT·Filed 2014·Granted Oct 17, 2017·1 cites·16 claims
- 1361US2025199414A1Microelectromechanical deviceBOSCH GMBH ROBERT·Filed 2025·Application pending·0 cites
- 1455US7834452B2Device made of single-crystal siliconBOSCH GMBH ROBERT·Filed 2008·Granted Nov 16, 2010·0 cites·4 claims
- 1550US9606141B2Micromechanical sensor deviceBOSCH GMBH ROBERT·Filed 2014·Granted Mar 28, 2017·0 cites·11 claims
- 1649US10914937B2Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirrorBOSCH GMBH ROBERT·Filed 2016·Granted Feb 9, 2021·0 cites·13 claims
- 1747US2016084865A1Integrated rotation rate and acceleration sensor and method for manufacturing an integrated rotation rate and acceleration sensorBOSCH GMBH ROBERT·Filed 2014·Application pending·0 cites
- 1845US10427937B2Method for producing a multilayer MEMS component, and corresponding multilayer MEMS componentBOSCH GMBH ROBERT·Filed 2016·Granted Oct 1, 2019·0 cites·14 claims
- 1943US8298962B2Device made of single-crystal siliconKAELBERER ARND·Filed 2010·Granted Oct 30, 2012·0 cites·4 claims
- 2041US7495328B2Micromechanical componentBOSCH GMBH ROBERT·Filed 2006·Granted Feb 24, 2009·0 cites·19 claims
- 2140US7081592B2Micromechanical switchBOSCH GMBH ROBERT·Filed 2003·Granted Jul 25, 2006·1 cites·13 claims
- 2239US8573059B2Acceleration sensor having an electrode bridgeKAELBERER ARND·Filed 2009·Granted Nov 5, 2013·0 cites·3 claims
- 2335US2005118742A1Method for reducing the adhesive properties of MEMS and anti-adhesion-coated deviceFiled 2004·Application pending·0 cites
- 2434US9932223B2Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structureBOSCH GMBH ROBERT·Filed 2016·Granted Apr 3, 2018·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →