Inventor · disambiguated record
Arkady Nikitin
Also filed as: NIKITIN ARKADY · NIKITIN ARKADY V · NIKITIN ARKADY VIKTOROVICH
16 granted patents·4 pending applications·106 citations·filing 1976–2007
92Inventor score
Files withGEN PHOSPHORIX LLC12NIKITIN ARKADY2YEREMIN DMITRIY2BEREZIN GENNADY NIKOLAEVICH1GEN MIOSPHORIX LLC1
Top patents by PatentIndex Score
20 records- 0172US6978215B2Method of determining of true nonlinearity of scan along a selected direction X or Y in scan microscopeGEN PHOSPHORIX LLC·Filed 2001·Granted Dec 20, 2005·11 cites·11 claims
- 0271US6909791B2Method of measuring a line edge roughness of micro objects in scanning microscopesGEN PHOSPHORIX LLC·Filed 2002·Granted Jun 21, 2005·19 cites·10 claims
- 0364US7209596B2Method of precision calibration of a microscope and the likeGEN PHOSPHORIX LLC·Filed 2004·Granted Apr 24, 2007·9 cites·1 claims
- 0461US6664532B2Method of precision calibration of magnification of scanning microscopes with the use of test diffraction gratingGEN PHOSPHORIX LLC·Filed 2001·Granted Dec 16, 2003·5 cites·4 claims
- 0559US6686587B2Method of precision calibration of magnification of a scanning microscopes with the use of test diffraction gratingGEN PHOSPHORIX LLC·Filed 2001·Granted Feb 3, 2004·7 cites·4 claims
- 0659US6608294B2Simple method of precision calibration of magnification of a scanning microscopes with the use of test diffraction gratingGEN PHOSPHORIX LLC·Filed 2001·Granted Aug 19, 2003·7 cites·5 claims
- 0755US6668099B1Method of measuring an angle of inclination of trapezoidal micro object side facesGEN PHOSPHORIX LLC·Filed 2000·Granted Dec 23, 2003·6 cites·7 claims
- 0854US6573500B2Method of precision calibration of magnification of a scanning microscope with the use of test diffraction gratingGEN PHOSPHORIX LLC·Filed 2001·Granted Jun 3, 2003·5 cites·3 claims
- 0954US6563116B1Method of measuring sizes of trapezoidal structureGEN MIOSPHORIX LLC·Filed 2000·Granted May 13, 2003·9 cites·8 claims
- 1052US7054000B2Method of calibration of magnification of microscopes having different operational principles for bringing them into a single, absolute scaleGEN PHOSPHORIX LLC·Filed 2003·Granted May 30, 2006·6 cites·9 claims
- 1149US2009121131A1Method of determination of resolution of scanning electron microscopeNIKITIN ARKADY·Filed 2007·Application pending·0 cites
- 1247US6878935B2Method of measuring sizes in scan microscopesGEN PHOSPHORIX·Filed 2002·Granted Apr 12, 2005·1 cites·15 claims
- 1343US6807314B1Method of precision calibration of a microscope and the likeGEN PHOSPHORIX LLC·Filed 1999·Granted Oct 19, 2004·15 cites·2 claims
- 1440US2006139456A1Device for and a method measuring sizes on photomasksNIKITIN ARKADY·Filed 2004·Application pending·0 cites
- 1539US7427756B2Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscopeGEN PHOSPHORIX LLC·Filed 2005·Granted Sep 23, 2008·0 cites·6 claims
- 1639US6969852B2Method of evaluating of a scanning electron microscope for precise measurementsGEN PHOSHONIX LLC·Filed 2004·Granted Nov 29, 2005·0 cites·6 claims
- 1738US2007081742A1Method of measuring an area of micro-objects of arbitrary shape in scanning electron microscopeYEREMIN DMITRIY·Filed 2005·Application pending·0 cites
- 1837US6982138B2Method of controlling removal of photoresist in openings of a photoresist maskGEN PHOSPHORIX LLC·Filed 2003·Granted Jan 3, 2006·0 cites·9 claims
- 1937US2008114561A1Method of determining micro- and nano- sizes in scanning electron microscopeYEREMIN DMITRIY·Filed 2006·Application pending·0 cites
- 2027US4026743AMethod of preparing transparent artworksBEREZIN GENNADY NIKOLAEVICH·Filed 1976·Granted May 31, 1977·6 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →