Inventor · disambiguated record
Ashwin M. Purohit
Also filed as: PUROHIT ASHWIN · PUROHIT ASHWIN M · PUROHIT ASHWIN MADHUKAR
16 granted patents·121 citations·filing 2006–2013
91Inventor score
Technology areasH10P
Files withAXCELIS TECH INC5LEE WILLIAM D4AXCELIS TECHNOLOGY INC1JUSTESEN PERRY J I1LEE WILLIAM DAVID1
Top patents by PatentIndex Score
16 records- 0191US8422193B2Annulus clamping and backside gas cooled electrostatic chuckTAO TENG CHAO D·Filed 2006·Granted Apr 16, 2013·58 cites·25 claims
- 0283US7952851B2Wafer grounding method for electrostatic clampsAXCELIS TECH INC·Filed 2008·Granted May 31, 2011·10 cites·12 claims
- 0382US7560705B2Workpiece handling scan arm for ion implantation systemAXCELIS TECH INC·Filed 2007·Granted Jul 14, 2009·12 cites·22 claims
- 0481US7751172B2Sliding wafer release gripper/wafer peeling gripperAXCELIS TECH INC·Filed 2006·Granted Jul 6, 2010·11 cites·15 claims
- 0580US8941968B2Heated electrostatic chuck including mechanical clamp capability at high temperatureJUSTESEN PERRY J I·Filed 2011·Granted Jan 27, 2015·6 cites·24 claims
- 0677US8270142B2De-clamping wafers from an electrostatic chuckLEE WILLIAM D·Filed 2008·Granted Sep 18, 2012·6 cites·18 claims
- 0776US7385799B1Offset phase operation on a multiphase AC electrostatic clampAXCELIS TECHNOLOGY INC·Filed 2007·Granted Jun 10, 2008·6 cites·25 claims
- 0875US9281227B2Multi-resistivity Johnsen-Rahbek electrostatic clampAXCELIS TECH INC·Filed 2013·Granted Mar 8, 2016·3 cites·19 claims
- 0970US8228658B2Variable frequency electrostatic clampingPUROHIT ASHWIN M·Filed 2007·Granted Jul 24, 2012·5 cites·6 claims
- 1062US9048276B2Matched coefficient of thermal expansion for an electrostatic chuckLEE WILLIAM D·Filed 2011·Granted Jun 2, 2015·1 cites·12 claims
- 1161US9036326B2Gas bearing electrostatic chuckLEE WILLIAM DAVID·Filed 2008·Granted May 19, 2015·2 cites·19 claims
- 1258US8797706B2Heated annulus chuckLEE WILLIAM DAVIS·Filed 2011·Granted Aug 5, 2014·1 cites·20 claims
- 1353US8023247B2Electrostatic chuck with compliant coatAXCELIS TECH INC·Filed 2008·Granted Sep 20, 2011·0 cites·11 claims
- 1448US8902560B2Electrostatic chuck ground punchSMITH DAVID B·Filed 2008·Granted Dec 2, 2014·0 cites·16 claims
- 1547US8241425B2Non-condensing thermos chuckLEE WILLIAM D·Filed 2009·Granted Aug 14, 2012·0 cites·11 claims
- 1636US9558980B2Vapor compression refrigeration chuck for ion implantersLEE WILLIAM D·Filed 2010·Granted Jan 31, 2017·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →