Inventor · disambiguated record
Atul M. Athalye
Also filed as: ATHALYE ATUL · ATHALYE ATUL M
8 granted patents·3 pending applications·85 citations·filing 1995–2023
84Inventor score
Top patents by PatentIndex Score
11 records- 0177US6065306AMethod and apparatus for purifying ammoniaBOC GROUP INC·Filed 1998·Granted May 23, 2000·34 cites·16 claims
- 0267US2023183068A1Novel method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamberLUNA JENNIFER BUGAYONG·Filed 2023·Application pending·0 cites
- 0361US6017382AMethod of processing semiconductor manufacturing exhaust gasesBOC GROUP INC·Filed 1998·Granted Jan 25, 2000·27 cites·13 claims
- 0460US11603313B2Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamberLUNA JENNIFER BUGAYONG·Filed 2021·Granted Mar 14, 2023·0 cites·37 claims
- 0549US12494374B2Methods for gas phase selective etching of silicon-germanium layersPRAXAIR TECHNOLOGY INC·Filed 2021·Granted Dec 9, 2025·0 cites·22 claims
- 0646US12410056B2Systems and processes for production of trisilylamineLINDE GMBH·Filed 2019·Granted Sep 9, 2025·0 cites·23 claims
- 0745US2013125788A1Low-volatility compounds for use in forming deposited layersAITCHISON KENNETH·Filed 2013·Application pending·0 cites
- 0843US2011048283A1Low-volatility compounds for use in forming deposited layersAITCHISON KENNETH·Filed 2008·Application pending·0 cites
- 0939US5799509AMulti-component recovery apparatus and methodBOC GROUP INC·Filed 1997·Granted Sep 1, 1998·11 cites·8 claims
- 1035US5547347AGas injection apparatus and methodBOC GROUP INC·Filed 1995·Granted Aug 20, 1996·7 cites·5 claims
- 1134US5645771AGas injection apparatus and method having application to gold leachingBOC GROUP INC·Filed 1995·Granted Jul 8, 1997·6 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →