Inventor · disambiguated record
Atsushi Harikai
Also filed as: HARIKAI ATSUSHI
57 granted patents·11 pending applications·388 citations·filing 2006–2024
97Inventor score
Top patents by PatentIndex Score
68 records- 0198US7906410B2Method of manufacturing semiconductor chip using laser light and plasma dicingPANASONIC CORP·Filed 2008·Granted Mar 15, 2011·192 cites·4 claims
- 0298US7767554B2Method of manufacturing semicondictor chipPANASONIC CORP·Filed 2008·Granted Aug 3, 2010·125 cites·6 claims
- 0395US12230484B2Plasma processing apparatus and plasma processing methodPANASONIC IP MAN CO LTD·Filed 2022·Granted Feb 18, 2025·2 cites·15 claims
- 0495US7994026B2Plasma dicing apparatus and method of manufacturing semiconductor chipsPANASONIC CORP·Filed 2008·Granted Aug 9, 2011·31 cites·2 claims
- 0591US12205823B2Method for producing element chipsPANASONIC IP MAN CO LTD·Filed 2021·Granted Jan 21, 2025·2 cites·7 claims
- 0688US10923357B2Element chip and manufacturing process thereofPANASONIC IP MAN CO LTD·Filed 2018·Granted Feb 16, 2021·5 cites·12 claims
- 0781US11189480B2Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2020·Granted Nov 30, 2021·1 cites·5 claims
- 0878US10763124B2Manufacturing process of element chipPANASONIC IP MAN CO LTD·Filed 2018·Granted Sep 1, 2020·2 cites·18 claims
- 0976US9859144B2Method of manufacturing element chipPANASONIC IP MAN CO LTD·Filed 2016·Granted Jan 2, 2018·2 cites·12 claims
- 1075US9653334B2Plasma processing apparatus and methodPANASONIC IP MAN CO LTD·Filed 2015·Granted May 16, 2017·2 cites·12 claims
- 1175US9431263B2Plasma processing method and apparatusPANASONIC IP MAN CO LTD·Filed 2015·Granted Aug 30, 2016·2 cites·8 claims
- 1274US11551974B2Manufacturing process of element chip using laser grooving and plasma-etchingPANASONIC IP MAN CO LTD·Filed 2021·Granted Jan 10, 2023·0 cites·7 claims
- 1374US9583355B2Plasma processing apparatus and plasma processing methodPANASONIC CORP·Filed 2014·Granted Feb 28, 2017·3 cites·2 claims
- 1473US9953906B2Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structurePANASONIC IP MAN CO LTD·Filed 2017·Granted Apr 24, 2018·2 cites·6 claims
- 1573US9780021B2Method of manufacturing element chip, method of manufacturing electronic component-mounted structure, and electronic component-mounted structurePANASONIC IP MAN CO LTD·Filed 2017·Granted Oct 3, 2017·2 cites·6 claims
- 1673US9076859B2Method of manufacturing semiconductor chipsHARIKAI ATSUSHI·Filed 2012·Granted Jul 7, 2015·4 cites·5 claims
- 1771US10410924B2Manufacturing process of element chipPANASONIC IP MAN CO LTD·Filed 2018·Granted Sep 10, 2019·1 cites·7 claims
- 1870US10892190B2Manufacturing process of element chipPANASONIC IP MAN CO LTD·Filed 2019·Granted Jan 12, 2021·1 cites·15 claims
- 1970US10497622B2Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2017·Granted Dec 3, 2019·1 cites·8 claims
- 2069US10147646B2Manufacturing process of element chipPANASONIC IP MAN CO LTD·Filed 2017·Granted Dec 4, 2018·1 cites·14 claims
- 2169US10037891B2Manufacturing method of element chipPANASONIC IP MAN CO LTD·Filed 2017·Granted Jul 31, 2018·1 cites·6 claims
- 2267US9911638B2Plasma processing apparatus and plasma processing methodPANASONIC IP MAN CO LTD·Filed 2016·Granted Mar 6, 2018·1 cites·13 claims
- 2367US9570272B2Plasma processing apparatus and plasma processing methodPANASONIC IP MAN CO LTD·Filed 2016·Granted Feb 14, 2017·1 cites·5 claims
- 2466US9922899B2Method of manufacturing element chip and element chipPANASONIC IP MAN CO LTD·Filed 2017·Granted Mar 20, 2018·1 cites·13 claims
- 2566US9911677B2Element chip and method for manufacturing the samePANASONIC IP MAN CO LTD·Filed 2017·Granted Mar 6, 2018·1 cites·5 claims
- 2666US9779986B2Plasma treatment method and method of manufacturing electronic componentPANASONIC IP MAN CO LTD·Filed 2016·Granted Oct 3, 2017·1 cites·16 claims
- 2764US9698052B2Method of manufacturing element chip and method of manufacturing electronic component-mounted structure using plasma etch to singulate element chipPANASONIC IP MAN CO LTD·Filed 2016·Granted Jul 4, 2017·1 cites·4 claims
- 2864US2025191920A1Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2024·Application pending·0 cites
- 2961US10923362B2Manufacturing process of element chipPANASONIC IP MAN CO LTD·Filed 2020·Granted Feb 16, 2021·0 cites·10 claims
- 3059US11830758B2Plasma processing methodPANASONIC IP MAN CO LTD·Filed 2021·Granted Nov 28, 2023·0 cites·9 claims
- 3158US10424488B2Method of manufacturing electronic componentPANASONIC IP MAN CO LTD·Filed 2018·Granted Sep 24, 2019·0 cites·7 claims
- 3258US2023420277A1Recipe proposal device and recipe proposal methodPANASONIC IP MAN CO LTD·Filed 2023·Application pending·0 cites
- 3357US11145548B2Manufacturing process of element chip using laser grooving and plasma-etchingPANASONIC IP MAN CO LTD·Filed 2019·Granted Oct 12, 2021·0 cites·7 claims
- 3454US11817323B2Etching method and element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2021·Granted Nov 14, 2023·0 cites·12 claims
- 3553US10026619B2Plasma treatment methodPANASONIC IP MAN CO LTD·Filed 2017·Granted Jul 17, 2018·0 cites·7 claims
- 3653US2022406660A1Element chip manufacturing method and substrate processing methodPANASONIC IP MAN CO LTD·Filed 2022·Application pending·0 cites
- 3753US2022402072A1Element chip manufacturing method and substrate processing methodPANASONIC IP MAN CO LTD·Filed 2022·Application pending·0 cites
- 3852US11361944B2Plasma processing method, and element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2020·Granted Jun 14, 2022·0 cites·7 claims
- 3951US12230541B2Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2021·Granted Feb 18, 2025·0 cites·4 claims
- 4050US12500076B2Cleaning method of electronic component and manufacturing method of element chipPANASONIC IP MAN CO LTD·Filed 2020·Granted Dec 16, 2025·0 cites·9 claims
- 4150US11682575B2Plasma processing apparatus, plasma processing method, and element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2020·Granted Jun 20, 2023·0 cites·8 claims
- 4250US10964597B2Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2019·Granted Mar 30, 2021·0 cites·7 claims
- 4349US10714356B2Plasma processing methodPANASONIC IP MAN CO LTD·Filed 2018·Granted Jul 14, 2020·0 cites·7 claims
- 4449US2022165577A1Element chip manufacturing method and plasma processing methodPANASONIC IP MAN CO LTD·Filed 2021·Application pending·0 cites
- 4548US11219929B2Element chip cleaning method, element chip cleaning apparatus, and element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2020·Granted Jan 11, 2022·0 cites·9 claims
- 4648US8110481B2Method of segmenting semiconductor waferARITA KIYOSHI·Filed 2008·Granted Feb 7, 2012·0 cites·10 claims
- 4747US11335564B2Element chip smoothing method and element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2020·Granted May 17, 2022·0 cites·4 claims
- 4846US11688641B2Element chip isolation method using laser grooving and plasma etchingPANASONIC IP MAN CO LTD·Filed 2020·Granted Jun 27, 2023·0 cites·6 claims
- 4945US10242914B2Element chip manufacturing methodPANASONIC IP MAN CO LTD·Filed 2018·Granted Mar 26, 2019·0 cites·11 claims
- 5044US10796960B2Manufacturing process of element chipPANASONIC IP MAN CO LTD·Filed 2018·Granted Oct 6, 2020·0 cites·8 claims
Showing the top 50 of 68 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →