Inventor · disambiguated record
Atsushi Hidaka
Also filed as: HIDAKA ATSUSHI
24 granted patents·7 pending applications·97 citations·filing 2007–2022
94Inventor score
Top patents by PatentIndex Score
31 records- 0194US8724974B2VaporizerOHMI TADAHIRO·Filed 2012·Granted May 13, 2014·9 cites·16 claims
- 0293US8047510B2Evaporation supply apparatus for raw material and automatic pressure regulating device used therewithFUJIKIN KK·Filed 2007·Granted Nov 1, 2011·17 cites·8 claims
- 0392US8931506B2Gas supply apparatus equipped with vaporizerNAGATA ATSUSHI·Filed 2009·Granted Jan 13, 2015·20 cites·15 claims
- 0491US9163743B2Piezoelectrically driven valve and piezoelectrically driven flow rate control deviceHIDAKA ATSUSHI·Filed 2010·Granted Oct 20, 2015·19 cites·13 claims
- 0588US11976356B2Vaporized feed deviceFUJIKIN KK·Filed 2020·Granted May 7, 2024·2 cites·7 claims
- 0684US9556518B2Raw material gas supply apparatus for semiconductor manufacturing equipmentFUJIKIN KK·Filed 2014·Granted Jan 31, 2017·6 cites·7 claims
- 0782US9733649B2Flow control system with build-down system flow monitoringFUJIKIN KK·Filed 2013·Granted Aug 15, 2017·5 cites·9 claims
- 0881US9791867B2Flow control device equipped with flow monitorFUJIKIN KK·Filed 2014·Granted Oct 17, 2017·5 cites·7 claims
- 0980US12203558B2Casing for fluid controller and fluid controller provided with sameFUJIKIN KK·Filed 2021·Granted Jan 21, 2025·1 cites·9 claims
- 1077US11768123B2Diaphragm type pressure sensor arrangement having corrosion resistance and yield strengthFUJIKIN KK·Filed 2019·Granted Sep 26, 2023·2 cites·8 claims
- 1176US9574917B2Pressure type flow rate control deviceHIDAKA ATSUSHI·Filed 2012·Granted Feb 21, 2017·5 cites·14 claims
- 1273US9994955B2Raw material vaporization and supply apparatusFUJIKIN KK·Filed 2013·Granted Jun 12, 2018·1 cites·14 claims
- 1370US9746856B2Multi-hole orifice plate for flow control, and flow controller using the sameFUJIKIN KK·Filed 2014·Granted Aug 29, 2017·2 cites·12 claims
- 1469US10274356B2Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using containerFUJIKIN KK·Filed 2015·Granted Apr 30, 2019·1 cites·13 claims
- 1567US10604840B2Liquid level indicator and liquid raw material vaporization feederFUJIKIN KK·Filed 2015·Granted Mar 31, 2020·1 cites·16 claims
- 1664US12405182B2Cover component for pressure sensor, and pressure sensor device comprising sameFUJIKIN KK·Filed 2021·Granted Sep 2, 2025·0 cites·8 claims
- 1763US10073469B2Flow meter and flow control device provided therewithFUJIKIN KK·Filed 2014·Granted Sep 11, 2018·1 cites·16 claims
- 1861US12398819B2Controller and vaporization supply deviceFUJIKIN KK·Filed 2022·Granted Aug 26, 2025·0 cites·11 claims
- 1958US11988543B2Abnormality detection method for flow rate control device, and flow rate monitoring methodFUJIKIN KK·Filed 2020·Granted May 21, 2024·0 cites·16 claims
- 2057US2014216339A1Raw material vaporizing and supplying apparatusFUJIKIN KK·Filed 2014·Application pending·0 cites
- 2156US11994482B2Driving device provided with piezoelectric element deterioration detection circuit and deterioration detection methodFUJIKIN KK·Filed 2020·Granted May 28, 2024·0 cites·14 claims
- 2256US2014124064A1Raw material vaporizing and supplying apparatusFUJIKIN KK·Filed 2013·Application pending·0 cites
- 2352US2023324008A1Gas supply system and gas supply methodFUJIKIN KK·Filed 2021·Application pending·0 cites
- 2451US2017364099A1Flow control system with build-down system flow monitoringFUJIKIN KK·Filed 2017·Application pending·0 cites
- 2551US2023002900A1Vaporization supply method and vaporization supply deviceFUJIKIN KK·Filed 2020·Application pending·0 cites
- 2646US11976748B2Diaphragm valveFUJIKIN KK·Filed 2020·Granted May 7, 2024·0 cites·5 claims
- 2744US2023121563A1Gas supply amount measurement method and gas supply amount control methodFUJIKIN KK·Filed 2021·Application pending·0 cites
- 2843US11390951B2Fluid control deviceFUJIKIN KK·Filed 2018·Granted Jul 19, 2022·0 cites·10 claims
- 2941US2020149162A1Fluid control deviceFUJIKIN KK·Filed 2018·Application pending·0 cites
- 3040US10646844B2Vaporization supply apparatusFUJIKIN KK·Filed 2016·Granted May 12, 2020·0 cites·12 claims
- 3139US11402250B2Liquid level meter, vaporizer equipped with the same, and liquid level detection methodFUJIKIN KK·Filed 2017·Granted Aug 2, 2022·0 cites·12 claims
Join the waitlist — get patent alerts
Get an alert when Atsushi Hidaka files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →