Inventor · disambiguated record
Atsuko Kubota
Also filed as: KUBOTA ATSUKO
6 granted patents·268 citations·filing 1987–1995
87Inventor score
Files withTOSHIBA KK6
Top patents by PatentIndex Score
6 records- 0186US5738942ASemiconductor silicon wafer and process for producing itTOSHIBA KK·Filed 1995·Granted Apr 14, 1998·73 cites·8 claims
- 0284US5534294AProcess for producing Semiconductor silicon waferTOSHIBA KK·Filed 1994·Granted Jul 9, 1996·79 cites·4 claims
- 0383US5071776AWafer processsing method for manufacturing wafers having contaminant-gettering damage on one surfaceTOSHIBA KK·Filed 1988·Granted Dec 10, 1991·74 cites·14 claims
- 0452US4862000AMethod for predicting density of micro crystal defects in semiconductor element from silicon wafer used in the manufacture of the element, and infrared absorption measurement apparatus for this methodTOSHIBA KK·Filed 1987·Granted Aug 29, 1989·17 cites·5 claims
- 0547US5148457ASystem for analyzing metal impurity on the surface of a single crystal semiconductor by using total reflection of x-rays fluorescenceTOSHIBA KK·Filed 1991·Granted Sep 15, 1992·14 cites·6 claims
- 0639US5508800ASemiconductor substrate, method of manufacturing semiconductor substrate and semiconductor device, and method of inspecting and evaluating semiconductor substrateTOSHIBA KK·Filed 1993·Granted Apr 16, 1996·11 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →