Inventor · disambiguated record

Atsushi Tajika

Also filed as: TAJIKA ATSUSHI

1 granted patent·1 pending application·3 citations·filing 2002–2003

24Inventor score

Technology areasH10P

Files withSHINETSU CHEMICAL CO1

Top patents by PatentIndex Score

2 records

0150US7179567B2Phase shift mask blank, phase shift mask, and method of manufactureSHINETSU CHEMICAL CO·Filed 2003·Granted Feb 20, 2007·3 cites·15 claims
0235US2003025216A1Phase shift mask blank, phase shift mask, and method of manufactureFiled 2002·Application pending·0 cites

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Atsushi Tajika — Patent Inventor | PatentIndex