Inventor · disambiguated record
Atsumi Yamaguchi
Also filed as: YAMAGUCHI ATSUMI
10 granted patents·4 pending applications·119 citations·filing 1992–2012
88Inventor score
Top patents by PatentIndex Score
14 records- 0175US6337175B1Method for forming resist patternMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Jan 8, 2002·40 cites·12 claims
- 0274US6774043B2Method of manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2001·Granted Aug 10, 2004·19 cites·18 claims
- 0364US5981149AMethod for manufacturing semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Nov 9, 1999·34 cites·12 claims
- 0460US6938238B2Method of manufacturing electronic deviceRENESAS TECH CORP·Filed 2003·Granted Aug 30, 2005·7 cites·3 claims
- 0551US6960481B2Evaluation methodRENESAS TECH CORP·Filed 2002·Granted Nov 1, 2005·4 cites·16 claims
- 0648US6849486B2Method of manufacturing a thinned gate electrode utilizing protective films and etchingRENESAS TECH CORP·Filed 2002·Granted Feb 1, 2005·2 cites·11 claims
- 0744US6607992B2Antireflection coating and semiconductor device manufacturing methodMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Aug 19, 2003·1 cites·9 claims
- 0842US2008241489A1Method of forming resist pattern and semiconductor device manufactured with the sameRENESAS TECH CORP·Filed 2008·Application pending·0 cites
- 0939US6518196B2Method of manufacturing semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Feb 11, 2003·0 cites·12 claims
- 1037US5902718AMethods and developer for developing a positive photoresistMITSUBISHI ELECTRIC CORP·Filed 1992·Granted May 11, 1999·5 cites·9 claims
- 1136US6136479AMethod of forming photomask and pattern and method of forming a semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Oct 24, 2000·7 cites·14 claims
- 1235US2003087196A1Resist pattern hardening methodMITSUBISHI ELECTRIC CORP·Filed 2002·Application pending·0 cites
- 1335US2004102048A1Method for manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2003·Application pending·0 cites
- 1434US2012193763A1Method of manufacturing semiconductor device, semiconductor device and resist coaterYAMAGUCHI ATSUMI·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →